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Printing integrated circuits (IC) requires tightly
controlled temperature and a RH of 35-45%. Required
humidity accuracy tolerances may fluctuate between
0.5 to 5% RH. Process engineers need humidity to prevent
electrostatic discharge and damage to solid state
chips in microlithography.
Because of large airflows used to preserve the integrity
of the cleanroom envelope, a budget friendly way of
controlling the humidity is important.
Mee Industries humidification systems can save energy.
The direct pressure atomization system can consume
100x less energy than a steam humidifier and can be
serviced without entering the production area.
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Commercial
HVAC