Semiconductors

A MeeFog™ Humidification system uses substantially less energy than other humidification technologies including compressed air, ultra-sonic and steam systems.

Manufactures Of Semiconductor Products Such As Solid State Chips In Microlithography Also Use Direct-Pressure, High-Pressure, Adiabatic Humidification Systems By MeeFog To Reduce The Chance Of Electrostatic Discharge And Preserve The Integrity Of The Cleanroom Envelope
MeeFog humidification systems offer high-tech solutions that will help improve your process, product and profitability.
Printing integrated circuits (IC) requires tightly controlled temperature and a RH of 35-45%. Required humidity accuracy tolerances may fluctuate between 0.5 to 5% RH. Process engineers need humidity to prevent electrostatic discharge and damage to solid state chips in microlithography.

Because of large airflows used to preserve the integrity of the cleanroom envelope, a budget friendly way of controlling the humidity is important.

Mee Industries humidification systems can save energy. The direct pressure atomization system can consume 100x less energy than a steam humidifier and can be serviced without entering the production area.

The MeeFog™ Humidification system is an efficient and cost-effective alternative to traditional methods of humidifiers. Most importantly, return on investment for installing a MeeFog™ System can be realized in less than one year.

Want proof?

We'll gladly supply a detailed payback analysis report for your existing semiconductors including:
  • Installed MeeFog™ system cost
  • Predicted Process Gains Per Year

MeeFog™ System Benefits:

  • Eliminates static electricity
  • Suspends airborne dust
  • Cools and conditions efficiently
  • Low energy consumptionLow energy consumption
  • Precise humidity level control
  • Easy to service and maintain
  • Ultra-fine fog droplets
  • Stainless steel construction
  • Flexible and easy to retrofit
  • Easy to specify
  • Guaranteed Results!

Showcase

The MeeFog™ Rack

The highly reliable, robustly engineered MeeFog™ rack incorporates a system of high-pressure pumps, which pressurize demineralized water. This ultra-clean water flows through a network of stainless steel tubes and then through the revolutionary MeeFog™ nozzles. Each self-contained MeeFog™ rack includes a programmable logic controller (PLC) control system that allows the system to operate safely in automatic mode.

Mee Industries' unique turnkey installations are made possible by our proprietary high-pressure MeeFog™ racks, allowing the completion of installations with as little as 1-2 day outages.

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The energy consumed is a small fraction of that required by other technologies, such as compressed air, ultra-sonic, or canister steam systems."

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