A MeeFog™ Humidification system uses substantially less energy than other humidification technologies including compressed air, ultra-sonic and steam systems.
MeeFog humidification systems offer high-tech solutions that will help improve your process, product and profitability.
Printing integrated circuits (IC) requires tightly controlled temperature and a RH of 35-45%. Required humidity accuracy tolerances may fluctuate between 0.5 to 5% RH. Process engineers need humidity to prevent electrostatic discharge and damage to solid state chips in microlithography.
Because of large airflows used to preserve the integrity of the cleanroom envelope, a budget friendly way of controlling the humidity is important.
Mee Industries humidification systems can save energy. The direct pressure atomization system can consume 100x less energy than a steam humidifier and can be serviced without entering the production area.
The MeeFog™ Humidification system is an efficient and cost-effective alternative to traditional methods of humidifiers. Most importantly, return on investment for installing a MeeFog™ System can be realized in less than one year.
We'll gladly supply a detailed payback analysis report for your existing semiconductors including:
- Installed MeeFog™ system cost
- Predicted Process Gains Per Year
MeeFog™ System Benefits:
- Eliminates static electricity
- Suspends airborne dust
- Cools and conditions efficiently
- Low energy consumptionLow energy consumption
- Precise humidity level control
- Easy to service and maintain
- Ultra-fine fog droplets
- Stainless steel construction
- Flexible and easy to retrofit
- Easy to specify
- Guaranteed Results!
The MeeFog™ Rack
The highly reliable, robustly engineered MeeFog™ rack incorporates a system of high-pressure pumps, which pressurize demineralized water. This ultra-clean water flows through a network of stainless steel tubes and then through the revolutionary MeeFog™ nozzles. Each self-contained MeeFog™ rack includes a programmable logic controller (PLC) control system that allows the system to operate safely in automatic mode.
Mee Industries' unique turnkey installations are made possible by our proprietary high-pressure MeeFog™ racks, allowing the completion of installations with as little as 1-2 day outages.
The energy consumed is a small fraction of that required by other technologies, such as compressed air, ultra-sonic, or canister steam systems."
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